发明名称 Photoresist and method for forming a relief image utilizing composition with copolymer binder having a major proportion of phenolic units and a minor proportion of non-aromatic cyclic alcoholic units
摘要 A photoresist that utilizes a copolymer of a phenol and a cyclic alcohol having increased optical transmission properties relative to photoresists using fully aromatic phenolic resins. Preferred binders are hydrogenated novolak resins and hydrogenated polyvinyl phenol resins.
申请公布号 US5210000(A) 申请公布日期 1993.05.11
申请号 US19920832004 申请日期 1992.02.06
申请人 SHIPLEY COMPANY INC. 发明人 THACKERAY, JAMES;ORSULA, GEORGE W.;SINTA, ROGER
分类号 G03F7/023;G03F7/029;G03F7/038 主分类号 G03F7/023
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