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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05114575(A)
申请公布日期
1993.05.07
申请号
JP19910272880
申请日期
1991.10.21
申请人
SHARP CORP
发明人
SATO SHINICHI
分类号
H01L21/28;H01L21/3205;H01L21/74;H01L21/768;H01L23/522
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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