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发明名称
INTEGRATED CIRCUIT DEVICE AND MANUFACTURE, PROCESSING EQUIPMENT AND PACKING CASE THEREFOR
摘要
申请公布号
JPH05114670(A)
申请公布日期
1993.05.07
申请号
JP19910207755
申请日期
1991.08.20
申请人
FUJITSU LTD
发明人
NAGASAWA MASAKI
分类号
B29C45/26;H01L21/56;H01L23/28;H01L23/50;H05K3/34
主分类号
B29C45/26
代理机构
代理人
主权项
地址
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