| 摘要 |
PURPOSE:To minimize the positional fluctuation or the distortion of the scanning of a light beam. CONSTITUTION:In a raster scanning system pattern scanning device provided with a scanning means which executes the main scanning of the light beam from a light source in a prescribed direction and a stage which is relatively moved a direction which is orthogonally crossed to the direction the main scanning with respect to the scanning means and which executes the sub- scanning of the light beam, the detection means 17 of a scanning position arranged on the stage, an arithmetic means 18 which obtains the positional deviation of the light beam on the stage based on a detection signal from the detection means 17, a positional change compensation means 19 which corrects the positional fluctuation of the scanning position of the light beam so as to negate the positional deviation obtained by the arithmetic means 8 and a distortion compensation means 22 which corrects the distortion of the scanning position are provided. |
