| 摘要 |
<p>PURPOSE:To perform processing by using data stored in a storing part of an IC card when a computer is interrupted, and enable progress management, by installing the IC card mounted on a product as an object to be worked or an accommodation body of the product. CONSTITUTION:A terminal equipment 2 and an optical transducer 3 are connected with a computer 1 wich performs lot progress management. A wafer cassette case 4 is mounted on a mounting stand 6. An IC card 5 is mounted on the part position on the side surface of the wafer cassette case 4 which part position faces the optical transducer 3. The IC card has a thin card form. A display part 7 using liquid crystal or the like is arranged on the upper part of the card. An input part 8 which receives various kinds of input is arranged on the right lower part. An optical transducer 9 which performs data exchange to the outside is installed. When the computer 1 can not be used, a control part 11 reads a recipe from a storing part 12, displays it on the display part 7, and performs processing.</p> |
