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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH05114704(A)
申请公布日期
1993.05.07
申请号
JP19910303947
申请日期
1991.10.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
ISHIDA MASAHIRO;ISHIGAKI YOSHIYUKI;UGA KIMIHARU;HONDA HIROMI
分类号
H01L21/8249;H01L27/06
主分类号
H01L21/8249
代理机构
代理人
主权项
地址
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