| 摘要 |
<p>PURPOSE:To obtain a semiconductor process supporting equipment wherein the time necessary to start a lot scheduling system is shortened, the impartment of real time processing function is enabled, a data analysis system is automatically started by completing a measurement process, and the impartment of automatic reporting function is enabled. CONSTITUTION:The title semiconductor process supporting system 10 is provided with the following; a lot progress managing system 3 which is constituted of a resident program, outputs a manufacturing process completion message when a manufacturing process is completed, and outputs a measurement process completion message when a measurement process is completed, a lot scheduling system 5 which starts the correction of manufacturing schedule when the manufacturing process completion message is received, and a data analysis system 4 which starts the analysis of measurement data obtained in the measurement process when the measurement process completion message is received.</p> |
