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经营范围
发明名称
ION-BEAM APPARATUS
摘要
申请公布号
JPH05114381(A)
申请公布日期
1993.05.07
申请号
JP19910273549
申请日期
1991.09.26
申请人
INTERNATL BUSINESS MACH CORP <IBM>
发明人
SUTEIIBUN JIEEMUZU KIICHI;JIEEMUZU PIITAA REBIN;ARUFURETSUDO WAAGUNAA
分类号
H01J27/00;G01Q30/20;H01J37/22;H01J37/28;H01J37/30;H01J37/305;H01J37/317;H01L21/265;H01L21/285;H01L21/302;H05H3/06
主分类号
H01J27/00
代理机构
代理人
主权项
地址
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