| 摘要 |
The transducer contains three planar technology micromechanical sensor elements (X,Y,Z), each sensitive to motion in one direction. The elements are integrated into a crystal surface layer so that the three directions of sensitivity are mutually perpendicular. The basic mechanical elements of the sensors are torsion beams (1). The torsion beams carry inertial masses whose centres of gravity lie far outside the torsion beams' rotation axes. The substrate material may be a silicon crystal or the beams are of silicon. Piezoresistive resistances making use of the piezoresistive effect in silicon to measure the mechanical stresses are integrated in the torsion beams. Alternatively, the beam stresses are indirectly measured by a capacitive method. |
