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发明名称
METHOD OF MAKING PATTERNS
摘要
申请公布号
EP0521649(A3)
申请公布日期
1993.05.05
申请号
EP19920305812
申请日期
1992.06.24
申请人
CIBA-GEIGY AG
发明人
BANKS, CHRISTOPHER PAUL
分类号
G03F7/26;C09D5/44;G03F7/40;H05K3/00;H05K3/06;H05K3/28;(IPC1-7):H05K3/02;G03F7/00;C23F1/02
主分类号
G03F7/26
代理机构
代理人
主权项
地址
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