Ultrasonic motor.

摘要

An ultrasonic motor wherein the excitation of the vibration mode is stabilized by the arrangement of the projection member, a method of securing the support and the shape of the vibration member on the vibration member composed of an elastic member and a piezo member for exciting the elastic progressive waves of the primary elastic progressive waves in a radial direction, and tertiary elastic progressive waves or more in the peripheral direction so that the ultrasmall-sized ultrasonic motor is provided superior in mass production and stable in characteristics, and the driving operation with the resonance impedance being lowered is easy to effect. <IMAGE>