发明名称 |
Ultraminiature single-crystal sensor with movable member |
摘要 |
A capacitive pressure sensor suitable for making highly sensitive, low pressure measurements is disclosed. The sensor may be mounted into a 0.5 mm OD catheter suitable for multipoint pressure measurements from within the coronary artery of the heart. The sensor employs a transducer which consists of a rectangular bulk silicon microdiaphragm several hundred microns on a side by two microns thick, surrounded by a supporting bulk silicon rim about 12 microns thick. Both the diaphragm and the rim are defined by a double diffusion etch-stop technique. The transducer fabrication process features a batch wafer-to-glass electrostatic seal followed by a silicon etch, which eliminates handling of individual small diaphragm structures until die separation and final packaging. An addressable read-out interface circuit may be used with the sensor to provide a high-level output signal, and allows the sensor to be compatible for use on a multisite catheter having only two electrical leads.
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申请公布号 |
US5207103(A) |
申请公布日期 |
1993.05.04 |
申请号 |
US19920885316 |
申请日期 |
1992.05.18 |
申请人 |
WISE, KENSALL D.;CHAU, HIN-LEUNG |
发明人 |
WISE, KENSALL D.;CHAU, HIN-LEUNG |
分类号 |
A61B5/0215;G01L9/00 |
主分类号 |
A61B5/0215 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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