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发明名称
METHOD AND APPARATUS FOR DETECTING DEFORMATIONS OF LEADS OF SEMICONDUCTOR DEVICE
摘要
申请公布号
US5208463(A)
申请公布日期
1993.05.04
申请号
US19910740605
申请日期
1991.08.05
申请人
HITACHI, LTD.
发明人
HONMA, MAKOTO;HIRAMOTO, SOTOZI;HATA, SEIJI;TOMITA, MASAMICHI;ISHIBASHI, AKIRA
分类号
G01B11/00;G01B11/24;G01N21/956;H01L21/66;H01L23/50;H05K13/08
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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