发明名称 |
RADIATION SENSITIVE DEVICES |
摘要 |
Improvements in or relating to Radiation Sensitive Devices. A radiation sensitive device comprising a substrate carrying a radiation sensitive layer is coated with a discontinuous covering layer which is more light sensitive than the radiation sensitive layer. The covering layer is formed by spraying and assists in improving vacuum drawdown during image-wise exposure of the device without having a deleterious affect on the exposure and development characteristics of the device. |
申请公布号 |
CA1317147(C) |
申请公布日期 |
1993.05.04 |
申请号 |
CA19860524379 |
申请日期 |
1986.12.02 |
申请人 |
VICKERS PLC |
发明人 |
COOPER, GRAHAM P. |
分类号 |
G03C1/72;G03C1/00;G03F7/00;G03F7/022;G03F7/023;G03F7/027;G03F7/038;G03F7/095;G03F7/115;G03F7/26 |
主分类号 |
G03C1/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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