发明名称 RADIATION SENSITIVE DEVICES
摘要 Improvements in or relating to Radiation Sensitive Devices. A radiation sensitive device comprising a substrate carrying a radiation sensitive layer is coated with a discontinuous covering layer which is more light sensitive than the radiation sensitive layer. The covering layer is formed by spraying and assists in improving vacuum drawdown during image-wise exposure of the device without having a deleterious affect on the exposure and development characteristics of the device.
申请公布号 CA1317147(C) 申请公布日期 1993.05.04
申请号 CA19860524379 申请日期 1986.12.02
申请人 VICKERS PLC 发明人 COOPER, GRAHAM P.
分类号 G03C1/72;G03C1/00;G03F7/00;G03F7/022;G03F7/023;G03F7/027;G03F7/038;G03F7/095;G03F7/115;G03F7/26 主分类号 G03C1/72
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