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发明名称
CONTROLLING METHOD FOR PRESSURE OF DRY ETCHING SYSTEM
摘要
申请公布号
JPH05109661(A)
申请公布日期
1993.04.30
申请号
JP19910298452
申请日期
1991.10.17
申请人
NEC CORP
发明人
HASEBE YUTAKA
分类号
C23F4/00;H01L21/302
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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