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发明名称
MANUFACTURE OF THIN FILM TRANSISTOR
摘要
申请公布号
JPH05109769(A)
申请公布日期
1993.04.30
申请号
JP19910297667
申请日期
1991.10.18
申请人
FUJI XEROX CO LTD
发明人
SAKAI YOSHIHIKO
分类号
H01L27/12;H01L21/336;H01L29/78;H01L29/786
主分类号
H01L27/12
代理机构
代理人
主权项
地址
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