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发明名称
SEMICONDUCTOR ELEMENT AND MANUFACTURE THEREOF
摘要
申请公布号
JPH05109651(A)
申请公布日期
1993.04.30
申请号
JP19910138595
申请日期
1991.05.15
申请人
OKI ELECTRIC IND CO LTD
发明人
ONODA HIROSHI
分类号
H01L21/28;H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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