摘要 |
PURPOSE:To obtain a gas laser oscillator which reduces consumption of laser medium gas and lowers a running cost. CONSTITUTION:Signal values are applied to a control apparatus 15 with a high voltage power supply 3a which outputs signals of electrical power or current values to be supplied to discharge electrodes 2a, 2b and these are integrated to open an electromagnetically controlled valve 12a in the exhaust side to exhaust a laser medium gas from a cabinet 1 in accordance with the electrical power or current value supplied from the discharge electrodes 2a, 2b. Then, new laser medium gas is supplied to the cabinet 1 from a bomb 9 as much as the exhausted gas using a pressure sensor 13, a comparator 14 and an electromagnetically controlled valve 10. |