| 摘要 |
<p>PURPOSE: To obtain a micro-optical element manufacturing system capable of highly reliably manufacturing a micro-optical element and manufacturing also a large array. CONSTITUTION: The system is provided with a laser light source 12 for supplying an optical beam capable of traveling on an optical beam line, an intensity control means 16 constituted of a Pockels cell 28, a shutter 30 and a space filter 32 to control the intensity of the optical beam, a two-dimensionally movable platform 18 for supporting a base body 22 consisting of a photosensitive material, a lens means 26 for focusing the optical beam, and a control means 20 including a system controller 53 and a step controller 52 and capable of controlling relative motion between the base body 22 and the focused optical beam 42 in accordance with a previously selected pattern restricted by a beam radiation intensity map of beams emitted from the optical element.</p> |
