| 摘要 |
PURPOSE:To enable a laser excitation light source to be controlled efficiently by judging deterioration of the laser excitation light source based on a deviation between a target output and an actual output of a laser medium. CONSTITUTION:A laser output detection signal SLA and a current detection signal SLI are set as an actual laser output Pj and an actual current Ij by giving command to a multiplexer 40h and an A/D converter 40i, thus obtaining a deviation DELTAP between a target output P0 and an actual laser output Pj and a deviation DELTAI between a lamp command current I0 and an actual current. Then, by giving command to a D/A converter 40g, a command signal SIV for correcting the lamp command current I0 is output to a current control circuit 20b. Then, when the actual laser output Pj is equal to the target output P0, a current threshold IMX of the target output P0 is obtained and then this current threshold value IMX is compared with the lamp command current In when the actual laser output Pj is equal to the target output P0. Then, when the lamp command current In is equal to or less than the current threshold IMX, it is determined that a lamp 10b did not deteriorate yet. |
