SUBSTRATE HOLDER FOR MOLECULAR-BEAM CRYSTAL GROWTH AND MOLECULAR-BEAM CRYSTAL GROWTH METHOD

摘要

PURPOSE:To provide a substrate holder which can restrain a substrate from slipping when the substrate is heated in a molecular-beam crystal growth operation. CONSTITUTION:A substrate holder 10 is provided with a plurality of support pieces 12a, 12b, 12c, 12d which support a substrate 13 so as to come into contact with a plurality of parts at the peripheral edge part of the substrate. The support pieces are installed at prescribed intervals so as to be capable of coming into contact with parts away from the peripheral edge part of the substrate 13.