DRY ETCHING METHOD,申请号JP19910269488-传众专利搜索

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发明名称	DRY ETCHING METHOD
摘要
申请公布号	JPH05109670(A)	申请公布日期	1993.04.30
申请号	JP19910269488	申请日期	1991.10.17
申请人	NEC CORP	发明人	TAKADO NOBUKAZU;KAWAMOTO SHIGERU
分类号	G01R33/64;G01N24/14;H01L21/302;H01L21/3065	主分类号	G01R33/64
代理机构		代理人
主权项
地址

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