| 摘要 |
PURPOSE:To obtain high sensitivity and to use a wide range of wavelength light by incorporating a specific compd., a naphthoquinone diazide deriv. and an alkaline-soluble polymer into the above compsn. CONSTITUTION:A system contg. the naphthoquinone diazide having a group which is hydrolyzed by an acid and the compd., such as onium salt, which generates an acid by active rays, in the alkaline-soluble polymer, such as cresol resin, is used. Namely, the compd. which is decomposed to generate the acid by irradiation with active rays or radiations, the naphthoquinone diazide deriv. expressed by formula I, and the alkaline-soluble polymer are incorporated therein. In the formula I, X is expressed by formulas II, III, etc.; R<1> to R<6> respectively independently denote a hydrogen atom, halogen atom, substd. or unsubstd. alkyl group, aryl group, alkoxy group, amino group, nitrile group; R<1> and R<2>, R<4> and R<5>, or R<3> and R<5> may bond to each other to form an alicycle, arom. ring or heterocycle. Ar denotes a substd. or unsubstd. aryl group; (n) denotes an integer from 1 to 7. |
