Integral scattered light measuring device, pref. for determining surface roughness parameters - has integral photometer containing detector for determining parts of angularly resolved scattered light source in individual angular segments

摘要

The appts. includes a light source (1), illumination light path (2), chopper (3), focussing lens (23), specimen carrier (21), selectively arranged stop sector in front of the specimen arrangement and a computerised display and evaluation unit (22). At least one integral photometer(8) contains at least one detector (13) which detects parts of the angularly resolved scattered light in individual angle regions by segmentation. USE/ADVANTAGE - Pref. for determination of surface roughness parameters, roughness anisotropy and scattered light distribution with a single device without additional requirements being placed on the dimensions of the integral photometer.