发明名称 TABLE
摘要 PURPOSE:To enable a sheet-shaped body, such as a glass plate to be placed on the specified position of a hot plate without impairing said body, by providing said hot plate with a plurality of gas withdrawing holes. CONSTITUTION:Hot plate 3 is provided with a plurality of small holes 5. When glass plate 2 is placed with an unfixing tool, such as unshown blades, the air between plate 2 and plate 3 goes out of holes 5 rapidly, thus permitting the compressed air generated instantaneously between plates 2, 3 not to float plate 2 in such a pressure, and plate 2 to come down exactly on the position intended to place.
申请公布号 JPS5627149(A) 申请公布日期 1981.03.16
申请号 JP19790102234 申请日期 1979.08.13
申请人 CHO LSI GIJUTSU KENKYU KUMIAI 发明人 HIRAI MICHIO
分类号 H01L21/683;G03F1/00;G03F1/54;G03F7/00;G03F7/26;G03F7/40;H01L21/027 主分类号 H01L21/683
代理机构 代理人
主权项
地址