ROTATING CYLINDRICAL MAGNETRON STRUCTURE FOR LARGE AREA COATING,申请号EP19910900458-传众专利搜索

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发明名称	ROTATING CYLINDRICAL MAGNETRON STRUCTURE FOR LARGE AREA COATING
摘要
申请公布号	EP0500774(A4)	申请公布日期	1993.04.28
申请号	EP19910900458	申请日期	1990.11.07
申请人	THE BOC GROUP, INC.	发明人	BOOZENNY, ALEX;HOOG, JOSEF, T.
分类号	C23C14/35;C23C14/34;H01J37/34;(IPC1-7):C23C14/35	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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