发明名称 |
Carbon cluster film having electrical conductivity and method of preparing the same. |
摘要 |
Disclosed herein is a stable carbon cluster film having precisely controlled electrical conductivity, which will not be deteriorated in a short period in air. Such a carbon cluster film having conductivity is formed by introducing an impurity into a thin film of fullerenes by ion implantation. The fullerenes include C1/4 <4>, C1/2 <4> or the like. |
申请公布号 |
EP0538797(A1) |
申请公布日期 |
1993.04.28 |
申请号 |
EP19920117931 |
申请日期 |
1992.10.20 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LIMITED |
发明人 |
UEBA, YOSHINOBU;OKUDA, NBUYUKI;OHKURA, KENGO;KUGAI, HIROKAZU |
分类号 |
C23C14/06;C30B23/02;C30B31/22 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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