摘要 |
A degassing apparatus in which a tube made of permeable film is laid in a vacuum chamber which is decompressed and controlled by a vacuum pump, and a liquid flowing in the tube is degassed by causing gas to permeate through the wall of the tube. The degassing apparatus comprises a valve for opening the vacuum chamber toward the atmosphere and/or a permeable film which is placed between the vacuum chamber and the atmosphere and/or a valve for opening the vacuum pump to the atmosphere which is disposed between the primary valve and the primary cylinder of the vacuum pump. This degassing apparatus can be very small in size and can operate stably.
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