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发明名称
摘要
申请公布号
JPH0528902(B2)
申请公布日期
1993.04.27
申请号
JP19860132818
申请日期
1986.06.10
申请人
KAIJO KK
发明人
MYOSHI HIDEAKI;KAMIHARASHI TAKASHI;HOSHAMA MASAAKI
分类号
H01L21/66;H01L21/60
主分类号
H01L21/66
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