THIN FILM FORMING APPARATUS,申请号JP19910267652-传众专利搜索

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发明名称	THIN FILM FORMING APPARATUS
摘要
申请公布号	JPH05106030(A)	申请公布日期	1993.04.27
申请号	JP19910267652	申请日期	1991.10.16
申请人	MITSUBISHI ELECTRIC CORP	发明人	ITO HIROMOTO
分类号	C23C14/32	主分类号	C23C14/32
代理机构		代理人
主权项
地址

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