摘要 |
PURPOSE:To provide a detection device of an ultrasonic probe for high frequency which is used for an ultrasonic microscope, etc., which can be evaluated easily and accurately. CONSTITUTION:An ultrasonic probe 4 is scanned within an XY plane while it is defocused for a pole target 6, a signal is received by a transmission means 1 and a reception means 7, and then a change in the intensity of the reception signal is detected by detection means 8 and 9. A symmetric property of an ultrasonic beam can be judged according to that of the signal intensity change. |