| 摘要 |
<p>PURPOSE:To quickly and easily measure the flow of arbitrary fluid without conducting calibration on each part of a device by measuring the heat capacity of the flow on the basis of an acumulated heat capacity and temperature change for the fluid within a tube in a stop state. CONSTITUTION:With a heater 2 heated, a measurement-intended fluid Sa within a tube 1 is heated, and the temperature after a specified time is detected by the use of a downstream side temperature detection sensor 7. It is input to a heat capacity measurement circuit 5 in order to determine a heat capacity Ca which is then output to a physical properties modifying circuit 10. Within the circuit 10 operation is performed in response to the heat capacity Ca, a factor Ka representing the physical properties of fluid Sa to be measured is determined. Within a flow operation circuit 4 a factor Ka is set in place of a calibration factor Kf determined for standard fluid Sf as a reference for flow rate calculation. Thereby, it is not necessary to conduct calibration at each part of a device every time when the fluid is exchanged and the flow rate of arbitrary fluid can be easily measured in a short time.</p> |
