| 摘要 |
<p>PURPOSE:To improve production yield in the manufacture of semi-conductors by preventing a change in N2 gas concentration and dancing of dust and so on at the time of putting in and out a cassette. CONSTITUTION:There is provided a tubular stocker easing 10 which has openings in its upper and lower parts and an inside N2 gas purge area, a rotary type stocker body 30 which is stored in a gas flow passage provided between it and a wall inner surface for partitioning an N2 gas purge area, a rotating mechanism which drives rotation of the stocker body, a position sensor 50 which detects the rotating position of the stocker body, an air supply chamber 60 where the N2 gas is filled, and an air discharge device 70. The position sensor 50 outputs a door open permission signal when respective cassette storage chambers are rotated to a prescribed position facing a cassette loading/unloading port, and the door unit 20 of the stocker body airtightly-shuts down the cassette storage chambers located at the prescribed position from the other part inside the stocker casing when the door unit 20 is opened.</p> |
