发明名称 Microwave activated gas generator
摘要 A microwave activated gas generator in which microwave energy is supplied to an activated gas formation region through which a gas to be activated flows in a high-velocity stream. The stream is disturbed within or proximate the activation region to form a downstream stagnation region within the activated gas formation region to encourage microwave gas activation for efficiently coupling power to the gas to form a high-volume, high-velocity activated gas stream.
申请公布号 US5206471(A) 申请公布日期 1993.04.27
申请号 US19910813978 申请日期 1991.12.26
申请人 APPLIED SCIENCE AND TECHNOLOGY, INC. 发明人 SMITH, DONALD K.
分类号 C23C16/452;C23C16/513;C23C16/515;H05H1/46 主分类号 C23C16/452
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