发明名称 |
Microwave activated gas generator |
摘要 |
A microwave activated gas generator in which microwave energy is supplied to an activated gas formation region through which a gas to be activated flows in a high-velocity stream. The stream is disturbed within or proximate the activation region to form a downstream stagnation region within the activated gas formation region to encourage microwave gas activation for efficiently coupling power to the gas to form a high-volume, high-velocity activated gas stream.
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申请公布号 |
US5206471(A) |
申请公布日期 |
1993.04.27 |
申请号 |
US19910813978 |
申请日期 |
1991.12.26 |
申请人 |
APPLIED SCIENCE AND TECHNOLOGY, INC. |
发明人 |
SMITH, DONALD K. |
分类号 |
C23C16/452;C23C16/513;C23C16/515;H05H1/46 |
主分类号 |
C23C16/452 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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