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发明名称
ION PLANTING APPARATUS
摘要
申请公布号
JPH05106032(A)
申请公布日期
1993.04.27
申请号
JP19910269429
申请日期
1991.10.17
申请人
JEOL LTD
发明人
KINDAICHI YOUZOU
分类号
C23C14/32
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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