Wafer polisher head having floating retainer ring,申请号US19910811568-传众专利搜索

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发明名称	Wafer polisher head having floating retainer ring
摘要
申请公布号	US5205082(A)	申请公布日期	1993.04.27
申请号	US19910811568	申请日期	1991.12.20
申请人	CYBEQ SYSTEMS, INC.	发明人	SHENDON, NORM;STRUVEN, KENNETH C.;KOLENKOW, ROBERT J.
分类号	B24B37/04;H01L21/304	主分类号	B24B37/04
代理机构		代理人
主权项
地址

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