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发明名称
SUSCETTORE
摘要
申请公布号
IT1236887(B)
申请公布日期
1993.04.26
申请号
IT19890022733
申请日期
1989.12.19
申请人
发明人
分类号
C23C16/44;C04B35/565;C23C16/458;H01L21/205;H01L21/31;(IPC1-7):H01L
主分类号
C23C16/44
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代理人
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