发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND DEVELOPING METHOD
摘要 PURPOSE:To provide a photosensitive resin composition short in developing time and wide in developing latitude. CONSTITUTION:This photosensitive resin composition comprises a polyamido acid having repeating units each represented by formula I; a polymerizable unsaturated compound represented by formulae II and III; a photopolymerization initiator; and an organic solvent, and the method for developing this photosensitive material is described. In formulae I-III, each of R3-R5 and R8-R10 is H or alkyl; each of R6, R7, R12, and R13 is a divalent hydrocarbon group; each of R11 and R14 is a tetravalent organic group; each of Y1-Y6 is H or a univalent organic group having ethylenically unsaturated group, each one of Y1-Y3 and Y4-Y6 is a univalent organic group having ethylenically unsaturated group, R1 is tetravalent arom. group, and R2 is divalent organic group.
申请公布号 JPH05100424(A) 申请公布日期 1993.04.23
申请号 JP19910257715 申请日期 1991.10.04
申请人 HITACHI CHEM CO LTD 发明人 NISHIZAWA HIROSHI;SATO KUNIAKI;KOJIMA YASUNORI;SUZUKI KENJI
分类号 G03F7/027;G03F7/037;G03F7/038;G03F7/075;G03F7/30;H01L21/027 主分类号 G03F7/027
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