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发明名称
DIRECT CURRENT BULK LIFETIME MEASUREMENT DEVICE AND MEASURING METHOD USE THEREOF
摘要
申请公布号
JPH05102270(A)
申请公布日期
1993.04.23
申请号
JP19910154127
申请日期
1991.05.28
申请人
SHIN ETSU HANDOTAI CO LTD
发明人
KITAGAWARA YUTAKA
分类号
G01N27/00;H01L21/66
主分类号
G01N27/00
代理机构
代理人
主权项
地址
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