X-RAY MASK STRUCTURE BODY, ITS MANUFACTURE AND X-RAY EXPOSURE METHOD USING THE SAME X-RAY MASK STRUCTURE BODY

摘要

PURPOSE:To provide a stable X-ray mask wherein the dislocation of a mask pattern is not caused against a change in the temperature of the X-ray mask. CONSTITUTION:An X-ray mask structure body is composed of the following: an X-ray absorber 3 having a desired pattern; an X-ray transmitting film 2 which holds the absorber; and a support frame 1 which supports the X-ray transmitting film. In the X-ray mask structure body and its manufacturing method, a layer which is composed of at least one kind of material whose coefficient of linear expansion is the same as the coefficient of linear expansion of the X-ray transmitting film 2 is provided on the pattern of the X-ray absorber.