| 摘要 |
PURPOSE:To obtain superior exposure visualizability at the time of low exposure by incorporating a quinonediazido compound, an alkali-soluble resin, a compound to be allowed to produce an acid by exposure, an organic dye, and a specified halogen compound. CONSTITUTION:This photosensitive composition contains at least a quinonediazido compound, an alkali-soluble resin, a compound to be allowed to produce an acid by exposure, and the organic dye, and the compound represented by formula I in which each of R<1>-R<3> is H, halogen, or alkyl halide but at least one of them is alkyl halide; and X is N or CH. An amount of the acid-producing compound to be added is, preferably, 0.2-10weight%, especially, 0.5-3weight% of the total solid weight of the composition, and an amount of the halogen compound to be added is, preferably, 0.2-10weight%, especially, 0.5-3weight% of the total solid weight, thus permitting the obtained photosensitive composition to have superior superior exposure visualizability at the time of low exposure. |
