| 摘要 |
PURPOSE:To speedily remove dust and dirt sticking on a reticle, a wafer, optical elements in an illumination optical system, the lens surface of a projection objective, etc. CONSTITUTION:Optical trapping technology which uses a laser beam is applied. This device has a laser light source 4, a light converging means 5 which converges light from the laser light source means 4, a scanning means 6 which scans an object surface with the converged light, a light detecting means 7 which detects reflected light from the converged light on the object surface, a decision means 8 which decides a foreign matter with the signal from the light detecting means, and a control means which controls the laser output from the laser light source means 4 according to the signal from the decision means 8. The output of the laser light source means is controlled according to whether or not the foreign matter is present and the foreign matter is trapped and moved with the high-energy laser light. |
