FORMING METHOD FOR OXIDE FILM,申请号JP19910260651-传众专利搜索

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发明名称	FORMING METHOD FOR OXIDE FILM
摘要
申请公布号	JPH05102130(A)	申请公布日期	1993.04.23
申请号	JP19910260651	申请日期	1991.10.08
申请人	TOKAI UNIV	发明人	MURAHARA MASATAKA;AOMORI SHIGERU
分类号	H01L21/268;H01L21/316	主分类号	H01L21/268
代理机构		代理人
主权项
地址

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