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发明名称
VERTICAL-TYPE X-Y STAGE
摘要
申请公布号
JPH05102011(A)
申请公布日期
1993.04.23
申请号
JP19920086613
申请日期
1992.03.11
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
KANAI MUNENORI;ISHIHARA SUNAO;UNE ATSUNOBU
分类号
B23Q1/00;B23Q1/70;H01L21/027
主分类号
B23Q1/00
代理机构
代理人
主权项
地址
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