EPITAXIAL GROWING APPARATUS,申请号JP19910262187-传众专利搜索

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发明名称	EPITAXIAL GROWING APPARATUS
摘要
申请公布号	JPH05102044(A)	申请公布日期	1993.04.23
申请号	JP19910262187	申请日期	1991.10.09
申请人	NISSAN MOTOR CO LTD	发明人	KANAI NOBUHIRO
分类号	C23C16/46;G01B11/16;H01L21/205	主分类号	C23C16/46
代理机构		代理人
主权项
地址

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