发明名称 WIREBONDING DEVICE
摘要 PURPOSE:To provide the title wirebonding device capable of stably forming balls of specific diameter by specifying the discharge region on the surface of a torch electrode during the ball formation step. CONSTITUTION:Within the title wirebonding device wherein a ball is formed on the end of a bonding wire 11 by the discharge between the bonding wire 11 and a flat plate torch electrode 13 so as to be bonded on to a specific electrode, an insulating film 15 having an aperture part 15a is formed on an opposite surface of the flat plate torch electrode 14 to the bonding wire 11 so that the electricity may be discharged through the aperture part 15a between the bonding wire 11 and the flat plate torch electrode 13.
申请公布号 JPH05102233(A) 申请公布日期 1993.04.23
申请号 JP19910257272 申请日期 1991.10.04
申请人 RICOH CO LTD 发明人 KOZUKA TAKESHI
分类号 H01L21/60 主分类号 H01L21/60
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