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发明名称
APPARATUS AND METHOD FOR LIQUID EPITAXIAL GROWTH
摘要
申请公布号
JPH05102052(A)
申请公布日期
1993.04.23
申请号
JP19910261941
申请日期
1991.10.09
申请人
SHARP CORP
发明人
HASHIMOTO TAKAHIRO
分类号
C30B19/06;H01L21/208
主分类号
C30B19/06
代理机构
代理人
主权项
地址
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