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发明名称
COMPOUND SEMICONDUCTOR WAFER AND ITS MANUFACTURE
摘要
申请公布号
JPH05102053(A)
申请公布日期
1993.04.23
申请号
JP19910256667
申请日期
1991.10.03
申请人
HITACHI CABLE LTD
发明人
OTOGI YOUHEI;KUMA SHOJI
分类号
H01L21/22;H01L21/322
主分类号
H01L21/22
代理机构
代理人
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