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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH05102294(A)
申请公布日期
1993.04.23
申请号
JP19910260101
申请日期
1991.10.08
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
OOKI NAGATOSHI;SHIMIZU AKIHIRO;HASHIMOTO NAOTAKA;YAMANAKA TOSHIAKI;HASHIMOTO KOJI;ISHIDA HIROSHI
分类号
H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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