| 摘要 |
<p>PURPOSE:To provide a plate-like body transfer device which is small in size and simple in structure and able to prevent foreign particles from attaching to a wafer. CONSTITUTION:A non-contact suction device comprises heads 21 and 22 which hold a wafer 1. A frame 18 is provided to an X direction moving block 14 which moves in an X direction so as to move in the directions of both Z and theta, and the first head 21 and the second head 22 are provided to the frame 18 so as to move in a Y direction. Therefore, the heads 21 and 22 are prevented from coming into contact with the wafer 1 at transfer, so that foreign particles are restrained from attaching to the wafer 1. Drive devices 13, 15, and 16 used for the movement in the directions of X, Y, and theta can be used for the first head 21 and the second head 22 in common, so that a wafer transfer device 10 can be made simple in structure and small in size as a whole and enhanced in operational reliability.</p> |
